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The Thermo Fisher Nova 200 Nanolab Scanning Electron Microscope/Focussed Ion Beam (SEM/FIB) offers advanced capabilities for surface and cross-section imaging, enabling users to analyze topology, chemistry, and phase contrast with high precision. This instrument boasts an accelerating voltage range of 0.2 to 30 kV for electrons and ions, translating to unparalleled flexibility for various sample types and imaging needs. With a remarkable electron resolution of 1.1 nm at 15 kV and ion resolution of 7 nm at 30 kV, it allows researchers to observe minute details in their samples, essential for cutting-edge material characterization. Additionally, the SEM/FIB is equipped with gas injectors and micromanipulators, empowering users to perform intricate specimen preparation techniques such as Transmission Electron Microscopy (TEM) and Atom Probe Tomography (APT). This fusion of high-resolution imaging and specimen preparation capabilities significantly enhances the user experience, enabling groundbreaking research and development across multiple scientific disciplines.
| Features | Specifications |
|---|---|
| Type | DualBeam SEM/FIB |
| Resolution | 1.1 nm @ 15 kV (TLD-SE) |
| Ions Acceleration Voltage | Up to 30 kV |
| Electron Acceleration Voltage | 0.2 to 30 kV |
| Imaging Detectors | Everhart-Thornley Detector (ETD), Through-the-lens Detector (TLD) |
| Minimum Etched Line Width | <15 nm |
| Pixel Resolution | 3584 x 3094 |
| Dwell Time | 50 ns - 1 ms |
| Beam Control | 3x IGP (total for electron column) |
| Chamber Vacuum | <2.6e-06 mbar |
| Evacuation Time | <5.0 mins |
| Minimum Step | 300 nm |
| Repeatability @ 0° tilt | 2 μm |
| Repeatability @ 52° tilt | 4 μm |
| Software | AutoFIB, AutoTEM, Slice and View |
| Gas Injectors | Platinum, XeF2 |
| Power Consumption | < 3.0 KVA |
| Operating Temperature | 20 °C ± 3 °C |
| Humidity | < 80% RH |
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