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The Thermo Fisher Helios 650 is a state-of-the-art Focused Ion Beam (FIB) tool designed for advanced materials characterization. Operating at a voltage range of 5-30 kV and a beam current from 1 picoampere (pA) to 100 nanoamperes (nA), it offers versatility for a wide range of applications. With a remarkable resolution of 5 nanometers at 30 kV, users can achieve precise imaging and analysis of nanoscale structures. The automated multi-axis stage control enhances usability, allowing for intricate sample manipulation and easier navigation. Equipped with a gas injection system for in-situ deposition, it combines high-resolution imaging capabilities with the ability to modify and fabricate nanostructures on samples up to 100 mm in size and 10 mm in thickness, making it an essential tool for researchers and engineers in the field.
| Features | Specifications |
|---|---|
| Tool Type | Focused Ion Beam (FIB) |
| Accelerating Voltage Electrons | 50V to 30 kV |
| Accelerating Voltage Ions | 0.5 kV to 30 kV |
| Beam Current Electrons | 0.8 pA to 26 nA |
| Beam Current Ions | 0.1 pA to 65 nA |
| Electron Filament | Schottky Field Emitter |
| Detectors | Secondary Electron Imaging, Everhart-Thornley Detector (ETD), Through-the-lens Detector (TLD), Backscattered Electron Imaging (CBS), Scanning Transmission Imaging (STEM), Ion Imaging (ICE) |
| Resolution SEM | 0.8 nm @ 15 kV (TLD-SE), 0.9 nm @ 1 kV (TLD-SE) |
| Resolution Ion |
|
| Gas Injectors | Platinum, Carbon |
| Micromanipulator | Omniprobe Autoprobe 200 |
| Included Software | AutoFIB, AutoTEM, 3DEDS, EBS3, Slice and View |
| Stage | Quorum PP3006 cryostage |
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