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The FEI Helios 600i Dual Beam SEM/FIB is a sophisticated workstation that combines scanning electron microscopy (SEM) with focused ion beam (FIB) capabilities to achieve ultra-high resolution imaging and precise milling. With a resolution of 1.4 nm at 1 kV and a beam current of up to 65 nA, it enables rapid and detailed nanoscale prototyping and machining. Users benefit from advanced detection technologies, including a high-performance Ion Conversion and Electron detector, ensuring excellent imaging quality and accurate material analysis. The system’s unique features, such as a retractable directional backscattered detector and beam deceleration mode, facilitate versatile sample handling at low landing energies, enhancing sample integrity. Overall, the Helios 600i is designed to meet the rigorous demands of nanotechnology research and development, providing users with powerful tools for innovation and discovery.
Features | Specifications |
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Type | Dual Beam Workstation |
Field Emission Cathode | Schottky Field Emission Cathode |
Electron Column | Elstar ultra-high resolution (UHR) |
Resolution SEM |
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Detector | Standard E-T SE detector and in-lens SE and BSE with high-angle collection |
Backscattered Electron Imaging | Retractable solid-state directional backscattered detector (DBS) |
STEM Detector |
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Beam Deceleration Mode | For low landing energies with sample bias up to 4 kV |
FIB Column | Tomahawk™ column with high-resolution (field emission) ion optics |
Beam Current | Up to 65 nA |
FIB Milling Resolution | Down to 4.0 nm at 1.1 pA @ 30 kV |
Low-Voltage Operation | Down to 500 V for near damage-free cleaning |
Ion and Electron Detection | High performance Ion Conversion and Electron (ICE) detector |
Charge Neutralizer | FIB charge neutralizer (low energy electron flood source) |
Platinum Deposition | Gas Injection Systems for EBID and IBID |
Nano-Manipulation | OmniProbe AutoProbe™ 200 in-situ nano-manipulator with 10 nm positioning |
Specimen Stage Travel | High-precision specimen piezo goniometer stage with 150 mm travel |
IR Camera | For viewing sample/column |
Optical Navigation | Optical color Nav-Cam for sample navigation |
Integrated Cleaning | Plasma cleaner and CryoCleaner LN 2 contamination trap |
Digital Patterning Engine | 16-bit patterning engine capable of Simultaneous Pattern and Imaging (iSPI™) |
Real Time Monitoring | Integrated Real Time Monitor (iRTM) of milling image |
Software |
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3D Reconstruction | Amira Software for 3D reconstruction of serial sections |
Programming | iFast Developers Tool Kit (programming automation) |
Not seeing what you need? Contact us for a custom job.
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