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FEI - Helios 600i Dual Beam FIB

FEI - Helios 600i Dual Beam FIB

Turnaround:

Cost3 business days

Description:

The FEI Helios 600i Dual Beam SEM/FIB is a sophisticated workstation that combines scanning electron microscopy (SEM) with focused ion beam (FIB) capabilities to achieve ultra-high resolution imaging and precise milling. With a resolution of 1.4 nm at 1 kV and a beam current of up to 65 nA, it enables rapid and detailed nanoscale prototyping and machining. Users benefit from advanced detection technologies, including a high-performance Ion Conversion and Electron detector, ensuring excellent imaging quality and accurate material analysis. The system’s unique features, such as a retractable directional backscattered detector and beam deceleration mode, facilitate versatile sample handling at low landing energies, enhancing sample integrity. Overall, the Helios 600i is designed to meet the rigorous demands of nanotechnology research and development, providing users with powerful tools for innovation and discovery.

Specifications:

FeaturesSpecifications
TypeDual Beam Workstation
Field Emission CathodeSchottky Field Emission Cathode
Electron ColumnElstar ultra-high resolution (UHR)
Resolution SEM
  • Sub-nanometer at higher beam energies
  • 1.4 nm@1 kV
DetectorStandard E-T SE detector and in-lens SE and BSE with high-angle collection
Backscattered Electron ImagingRetractable solid-state directional backscattered detector (DBS)
STEM Detector
  • For bright and dark-field transmitted electron imaging
  • 0.8 nm at 30 kV
Beam Deceleration ModeFor low landing energies with sample bias up to 4 kV
FIB ColumnTomahawk™ column with high-resolution (field emission) ion optics
Beam CurrentUp to 65 nA
FIB Milling ResolutionDown to 4.0 nm at 1.1 pA @ 30 kV
Low-Voltage OperationDown to 500 V for near damage-free cleaning
Ion and Electron DetectionHigh performance Ion Conversion and Electron (ICE) detector
Charge NeutralizerFIB charge neutralizer (low energy electron flood source)
Platinum DepositionGas Injection Systems for EBID and IBID
Nano-ManipulationOmniProbe AutoProbe™ 200 in-situ nano-manipulator with 10 nm positioning
Specimen Stage TravelHigh-precision specimen piezo goniometer stage with 150 mm travel
IR CameraFor viewing sample/column
Optical NavigationOptical color Nav-Cam for sample navigation
Integrated CleaningPlasma cleaner and CryoCleaner LN 2 contamination trap
Digital Patterning Engine16-bit patterning engine capable of Simultaneous Pattern and Imaging (iSPI™)
Real Time MonitoringIntegrated Real Time Monitor (iRTM) of milling image
Software
  • AutoTEM for automated milling of TEM lamellae
  • Auto Slice and View Basic for serial sectioning and imaging
3D ReconstructionAmira Software for 3D reconstruction of serial sections
ProgrammingiFast Developers Tool Kit (programming automation)

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